8/27/2010	1:14:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2010	1:14:53 PM	Recipe started at 1:14 PM
8/27/2010	1:14:53 PM	H2 valve closed
8/27/2010	1:14:53 PM	BCl3 valve closed
8/27/2010	1:14:53 PM	PH3 valve closed
8/27/2010	1:14:53 PM	SiCl4 pre valve closed
8/27/2010	1:14:53 PM	SiCl4 post valve closed
8/27/2010	1:14:53 PM	Main Vac valve closed
8/27/2010	1:14:53 PM	Bypass valve closed
8/27/2010	1:14:53 PM	Bubbler valve closed
8/27/2010	1:14:53 PM	Helium valve opened
8/27/2010	1:14:53 PM	Helium MFC set to  500.000000
8/27/2010	1:14:53 PM	H2 MFC set to  0.000000
8/27/2010	1:14:53 PM	BCl3 MFC set to  0.000000
8/27/2010	1:14:53 PM	PHl3 MFC set to  0.000000
8/27/2010	1:14:53 PM	SiCl4 MFC set to  0.000000
8/27/2010	1:14:53 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	1:14:53 PM	Tube furnace set to 0
8/27/2010	1:16:12 PM	Helium valve closed
8/27/2010	1:16:12 PM	H2 valve closed
8/27/2010	1:16:12 PM	BCl3 valve closed
8/27/2010	1:16:12 PM	PH3 valve closed
8/27/2010	1:16:12 PM	SiCl4 pre valve closed
8/27/2010	1:16:12 PM	SiCl4 post valve closed
8/27/2010	1:16:12 PM	Main Vac valve closed
8/27/2010	1:16:12 PM	Bypass valve closed
8/27/2010	1:16:12 PM	Bubbler valve closed
8/27/2010	1:16:12 PM	Helium MFC set to  0.000000
8/27/2010	1:16:12 PM	H2 MFC set to  0.000000
8/27/2010	1:16:12 PM	BCl3 MFC set to  0.000000
8/27/2010	1:16:12 PM	PHl3 MFC set to  0.000000
8/27/2010	1:16:12 PM	SiCl4 MFC set to  0.000000
8/27/2010	1:16:12 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	1:16:12 PM	Tube furnace set to 0
8/27/2010	1:16:12 PM	Run finished at 1:16 PM
8/27/2010	1:16:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2010	1:23:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2010	1:23:30 PM	Recipe started at 1:23 PM
8/27/2010	1:23:30 PM	Helium valve closed
8/27/2010	1:23:30 PM	H2 valve closed
8/27/2010	1:23:30 PM	BCl3 valve closed
8/27/2010	1:23:30 PM	PH3 valve closed
8/27/2010	1:23:30 PM	SiCl4 pre valve closed
8/27/2010	1:23:30 PM	SiCl4 post valve closed
8/27/2010	1:23:30 PM	Main Vac valve closed
8/27/2010	1:23:30 PM	Bubbler valve closed
8/27/2010	1:23:30 PM	Bypass valve opened
8/27/2010	1:23:30 PM	Helium MFC set to  0.000000
8/27/2010	1:23:30 PM	H2 MFC set to  0.000000
8/27/2010	1:23:30 PM	BCl3 MFC set to  0.000000
8/27/2010	1:23:30 PM	PHl3 MFC set to  0.000000
8/27/2010	1:23:30 PM	SiCl4 MFC set to  0.000000
8/27/2010	1:23:30 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	1:23:30 PM	Tube furnace set to 0
8/27/2010	1:24:08 PM	Helium valve closed
8/27/2010	1:24:08 PM	H2 valve closed
8/27/2010	1:24:08 PM	BCl3 valve closed
8/27/2010	1:24:08 PM	PH3 valve closed
8/27/2010	1:24:08 PM	SiCl4 pre valve closed
8/27/2010	1:24:08 PM	SiCl4 post valve closed
8/27/2010	1:24:08 PM	Bubbler valve closed
8/27/2010	1:24:08 PM	Main Vac valve opened
8/27/2010	1:24:08 PM	Bypass valve opened
8/27/2010	1:24:08 PM	Helium MFC set to  0.000000
8/27/2010	1:24:08 PM	H2 MFC set to  0.000000
8/27/2010	1:24:08 PM	BCl3 MFC set to  0.000000
8/27/2010	1:24:08 PM	PHl3 MFC set to  0.000000
8/27/2010	1:24:08 PM	SiCl4 MFC set to  0.000000
8/27/2010	1:24:08 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	1:24:08 PM	Tube furnace set to 0
8/27/2010	1:24:08 PM	Run finished at 1:24 PM
8/27/2010	1:24:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2010	2:55:05 PM	Helium valve opened
8/27/2010	2:55:08 PM	Helium MFC set to  100.000000
8/27/2010	3:35:21 PM	Helium valve closed
8/27/2010	4:22:38 PM	Helium valve opened
8/27/2010	4:41:46 PM	Helium valve closed
8/27/2010	5:22:31 PM	Recipe started at 5:22 PM
8/27/2010	5:22:31 PM	Helium valve closed
8/27/2010	5:22:31 PM	BCl3 valve closed
8/27/2010	5:22:31 PM	PH3 valve closed
8/27/2010	5:22:31 PM	SiCl4 pre valve closed
8/27/2010	5:22:31 PM	SiCl4 post valve closed
8/27/2010	5:22:31 PM	Main Vac valve closed
8/27/2010	5:22:31 PM	Bypass valve closed
8/27/2010	5:22:31 PM	Bubbler valve closed
8/27/2010	5:22:31 PM	H2 valve opened
8/27/2010	5:22:31 PM	Helium MFC set to  0.000000
8/27/2010	5:22:31 PM	H2 MFC set to  500.000000
8/27/2010	5:22:31 PM	BCl3 MFC set to  0.000000
8/27/2010	5:22:31 PM	PHl3 MFC set to  0.000000
8/27/2010	5:22:31 PM	SiCl4 MFC set to  0.000000
8/27/2010	5:22:31 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	5:22:31 PM	Tube furnace set to 100
8/27/2010	5:23:54 PM	Helium valve closed
8/27/2010	5:23:54 PM	BCl3 valve closed
8/27/2010	5:23:54 PM	PH3 valve closed
8/27/2010	5:23:54 PM	SiCl4 pre valve closed
8/27/2010	5:23:54 PM	SiCl4 post valve closed
8/27/2010	5:23:54 PM	Main Vac valve closed
8/27/2010	5:23:54 PM	Bypass valve closed
8/27/2010	5:23:54 PM	H2 valve opened
8/27/2010	5:23:54 PM	Bubbler valve opened
8/27/2010	5:23:54 PM	Helium MFC set to  0.000000
8/27/2010	5:23:54 PM	H2 MFC set to  500.000000
8/27/2010	5:23:54 PM	BCl3 MFC set to  0.000000
8/27/2010	5:23:54 PM	PHl3 MFC set to  0.000000
8/27/2010	5:23:54 PM	SiCl4 MFC set to  0.000000
8/27/2010	5:23:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	5:23:54 PM	Tube furnace set to 1000
8/27/2010	5:36:25 PM	Helium valve closed
8/27/2010	5:36:25 PM	PH3 valve closed
8/27/2010	5:36:25 PM	Main Vac valve closed
8/27/2010	5:36:25 PM	Bypass valve closed
8/27/2010	5:36:25 PM	H2 valve opened
8/27/2010	5:36:25 PM	BCl3 valve opened
8/27/2010	5:36:25 PM	SiCl4 pre valve opened
8/27/2010	5:36:25 PM	SiCl4 post valve opened
8/27/2010	5:36:25 PM	Bubbler valve opened
8/27/2010	5:36:25 PM	Helium MFC set to  0.000000
8/27/2010	5:36:25 PM	H2 MFC set to  500.000000
8/27/2010	5:36:25 PM	BCl3 MFC set to  29.000000
8/27/2010	5:36:25 PM	PHl3 MFC set to  0.000000
8/27/2010	5:36:25 PM	SiCl4 MFC set to  50.000000
8/27/2010	5:36:25 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	5:36:25 PM	Tube furnace set to 1000
8/27/2010	5:42:25 PM	H2 valve closed
8/27/2010	5:42:25 PM	BCl3 valve closed
8/27/2010	5:42:25 PM	PH3 valve closed
8/27/2010	5:42:25 PM	SiCl4 pre valve closed
8/27/2010	5:42:25 PM	SiCl4 post valve closed
8/27/2010	5:42:25 PM	Main Vac valve closed
8/27/2010	5:42:25 PM	Bypass valve closed
8/27/2010	5:42:25 PM	Helium valve opened
8/27/2010	5:42:25 PM	Bubbler valve opened
8/27/2010	5:42:25 PM	Helium MFC set to  500.000000
8/27/2010	5:42:25 PM	H2 MFC set to  0.000000
8/27/2010	5:42:25 PM	BCl3 MFC set to  0.000000
8/27/2010	5:42:25 PM	PHl3 MFC set to  0.000000
8/27/2010	5:42:25 PM	SiCl4 MFC set to  0.000000
8/27/2010	5:42:25 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	5:42:25 PM	Tube furnace set to 0
8/27/2010	6:02:25 PM	Helium valve closed
8/27/2010	6:02:25 PM	H2 valve closed
8/27/2010	6:02:25 PM	BCl3 valve closed
8/27/2010	6:02:25 PM	PH3 valve closed
8/27/2010	6:02:25 PM	SiCl4 pre valve closed
8/27/2010	6:02:25 PM	SiCl4 post valve closed
8/27/2010	6:02:25 PM	Main Vac valve closed
8/27/2010	6:02:25 PM	Bypass valve closed
8/27/2010	6:02:25 PM	Bubbler valve closed
8/27/2010	6:02:25 PM	Helium MFC set to  0.000000
8/27/2010	6:02:25 PM	H2 MFC set to  0.000000
8/27/2010	6:02:25 PM	BCl3 MFC set to  0.000000
8/27/2010	6:02:25 PM	PHl3 MFC set to  0.000000
8/27/2010	6:02:25 PM	SiCl4 MFC set to  0.000000
8/27/2010	6:02:25 PM	Bypass solenoid MFC set to  0.000000
8/27/2010	6:02:26 PM	Tube furnace set to 0
8/27/2010	6:02:26 PM	Run finished at 6:02 PM
